ALD & MLD for MEMS/NEMS Devices
ALD can also be used as a fabrication tool to create novel structures. New directions include NEMS nanofabrication using ALD and MLD. MLD can deposit precise sacrificial layers that can be removed after ALD and MLD processing . The sacrificial layers become air gaps that are useful for the fabrication of mechanical switches and bridges . The accompanying figure shows a schematic representation and the SEM image of a W ALD bridge defined by a ABC aluconeairgap. ALD-coated carbon nanotubes or nanowires may also be useful for sensors for MEMS/NEMS devices.