ALD & MLD for MEMS/NEMS Devices
The ability of ALD to grow conformal films on high aspect structures is extremely valuable for microelectromechanical systems (MEMS) applications. ALD coatings can enhance MEMS reliability by providing protecting coatings that minimize mechanical wear . ALD coatings can also be used to insulate, facilitate charge dissipation and functionalize the surface of MEMS devices . Much of our research on ALD for MEMS and nanoelectromechanical systems (NEMS) is conducted in collaboration with Prof. Victor Bright's group in the Dept. of Mechnical Engineering at the University of Colorado.
ALD can also be used as a fabrication tool to create novel structures. New directions include NEMS nanofabrication using ALD and MLD. MLD can deposit precise sacrificial layers that can be removed after ALD and MLD processing . The sacrificial layers become air gaps that are useful for the fabrication of mechanical switches and bridges . The accompanying figure shows a schematic representation and the SEM image of a W ALD bridge defined by a ABC aluconeairgap. ALD-coated carbon nanotubes or nanowires may also be useful for sensors for MEMS/NEMS devices.
Nanyoly Mendez
CAF
