Electrostatic Pull-In Modeling of a MEMS Ring Gyroscope Structure

Modeling Pull-In behavior of MEMS devices is one of the essential technologies needed to design Electro-Mechanical devices. Over the years many papers have been published on analytical models for Pull-In behavior, most of which deal with simple beam like structures.

An alternative to closed form analytical solutions people use special MEMS multi-domain Finite Element Methods or Boundary Element Methods. These simulation tools give very accurate results but are limited by simulation times.

A different simulation technique, behavioral modeling, can achieve the same accuracy as Finite Element methods but with simulation speeds 100x or 1000x faster.

A detailed application note on modeling and simulating a ring gyro can be found on the Coventor Application Gallery pages.

Have a look at this example which has curved beams with curved electrodes underneath. The animation shows a time-sequence of a ring structure under increased voltage load, contact to the electrode and release of the structure after the voltage is removed.

Visualization of behavioral model Pull In simulation

Nombre: Lenny D. Ramirez C.
Asignatura: CRF
Dirección http http://info.coventor.com/memsahead/bid/34290/Electrostatic-Pull-In-Modeling-of-a-MEMS-Ring-Gyroscope-Structure
Ver blogg: http://lennyramirez-crf2.blogspot.com/