Resonant 2D scanning mirrors, whose rotation is actuated by vertical electrostatic combs and can enable the out-of-plane rotation both in x- and y- direction by a gimbal structure , are very attractive in the application of mini image projectors due to their simple driving mechanism and fabrication process. An electrostatically (ES) actuated 2D scanning mirror is shown in Figure 1
Coventor's Architect software is employed to build a 3D model of the device. A simplified schematic of the model is shown in Figure 2. Mirror plate, supported by a pair of 'Beam' components, was modeled using 'Rigid Plate' component from the Architect parts library. The electrical driving force was applied to the mirror by the component 'Comb Stator'. A 2D model was realized by adding another set of 'Rigid Plate', 'Beam' and 'Comb Stator', which represent the gimbal structure.
As it is known that the motion of the mirror is highly nonlinear, Architect is used to simulate the transient frequency response instead of solving complicated ordinary differentiate equation. The mirror response due to a down sweeping frequency of an excitation source is shown in Figure 3
Nombre: Lenny D. Ramirez C.
Ver blogg: http://lennyramirez-crf2.blogspot.com/