This paper explains the modeling behind CoventorWare-ARCHITECT which will allow you to go further than just plain and simple resonance frequency analysis in Finite Element Software. The biggest problem for Gyro designers is getting past the initial stage. Once the design is analyzed for matching frequencies the design questions get tougher; what is the driving voltage, can I lower my noise floor, etc. In order to answer these questions and more you can't use your Finite Element models anymore because they just take to long to run, you need to add the sensing electrostatic fields and even worse, you need to run transient (i.e. time dependent) simulations with your Sigma-Delta circuit!
The paper describes a modeling technique that uses Finite Element definitions for the 3D mechanics as shown in the figure below:
The schematic from the paper models the full 3D electrostatic-mechanical model as shown in this figure:
Ver blogg: http://lennyramirez-crf2.blogspot.com