A different simulation technique, behavioral modeling, can achieve the same accuracy as Finite Element methods but with simulation speeds 100x or 1000x faster.
A detailed application note on modeling and simulating a ring gyro can be found on the Coventor Application Gallery pages.
Have a look at this example which has curved beams with curved electrodes underneath. The animation shows a time-sequence of a ring structure under increased voltage load, contact to the electrode and release of the structure after the voltage is removed.
Nombre: Lenny D. Ramirez C.
Dirección http http://info.coventor.com/memsahead/bid/34290/Electrostatic-Pull-In-Modeling-of-a-MEMS-Ring-Gyroscope-Structure
Ver blogg: http://lennyramirez-crf2.blogspot.com/